| 摘要 |
<p>A shape-variable mirror comprises a substrate (1), a plurality of very small mirrors (20) supported separately from each other by the substrate (1), and a plurality of drive units which independently drive each of the plurality of very small mirrors (20) and control the arrangement relationship between each very small mirror (20) and the substrate (1). Each of the plurality of drive units comprises a plurality of fixed electrodes (5 to 7) to which the drive voltage independent from each other can be applied, and movable electrodes (13 to 15) disposed on the positions facing the plurality of fixed electrodes (5 to 7). Each very small mirror (20) is connected to at least two movable electrodes (13 to 15) correlated to each very small mirror (20). Displacement of each very small mirror (20) in the direction vertical to the substrate (1) and/or inclination to the substrate can be obtained by the electrostatic force generated by the electric potential difference between the movable electrodes (13 to 15) and the fixed electrodes (5 to 7).</p> |
