发明名称 EMBEDDED CAPACITOR FILMS WITH HIGH DIELECTRIC CONSTANT AND LOW TOLERANCE USING MULTIMODAL POWDER SIZE DISTRIBUTION AND FABRICATING METHOD THEREOF
摘要 PURPOSE: An embedded capacitor films with high dielectric constant and low tolerance using multimodal powder size distribution and a fabricating method thereof are provided to enhance the capacitance by improving the high dielectric constant of the built-in capacitor film. CONSTITUTION: An embedded capacitor film includes ceramic powders, a polymer resin, and a hardener. The embedded capacitor film includes one or more ceramic powders having different particle sizes. A maximum charge ratio is increased by inserting the powders of small sizes between the powders of large sizes. A dielectric constant of the ceramic powders is more than 4. The ceramic powders are formed with one or more materials selected from BaTiO3, PMN-PT, and BST. The ceramic powders of 30 to 85 vol% are added to the embedded capacitor film.
申请公布号 KR20030065200(A) 申请公布日期 2003.08.06
申请号 KR20020005707 申请日期 2002.01.31
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 BAEK, GYEONG UK;CHO, SEONG DONG;LEE, JU YEON
分类号 H01L27/04;(IPC1-7):H01L27/04 主分类号 H01L27/04
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