发明名称 |
Method and system for providing a polysilicon stringer monitor |
摘要 |
A system and method detecting the presence of polysilicon stringers on a memory array using a polysilicon stringer monitor. The polysilicon stringer monitor includes a continuous type-2 layer of polysilicon forming a first row and a second row across the active region and covering the active region in-between the first and second rows. The polysilicon stringer monitor further includes a continuous type-1 layer of polysilicon extending under the first row, wherein the type-1 layer also covers the active area in-between the first and second rows as well as covers the active area under the second row.
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申请公布号 |
US6602776(B1) |
申请公布日期 |
2003.08.05 |
申请号 |
US20020155500 |
申请日期 |
2002.05.23 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
HIGASHITANI MASAAKI;FANG HAO |
分类号 |
H01L23/544;(IPC1-7):H01L21/44 |
主分类号 |
H01L23/544 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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