Vacuum pump has a screw impeller and housing with pressure deformable wall cavities to control air gaps

摘要

The impeller (3) and shaft (2) rotate in a cavity (11,21,31) having walls with spaces (12,22,32) with sides (13,23,33) which are deformed by pressure units (15,25,35) as sensors (16,26,36) and control units (17,27,37) regulate the pressure to reduce the gaps.