| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam irradiation device allowing simplification, miniaturization and cost reduction of the device, or reduction of conductance of evacuation. SOLUTION: This electron beam irradiation device is at least provided with: an electron beam source; an acceleration electrode for accelerating electrons emitted from the electron beam source; and an electron lens for converging the accelerated electron beam; and a means for sweeping the irradiation position of the electron beam onto a sample. An evacuation system of the electron beam irradiation device is stopped when reaching a set value of a first degree of vacuum. The evacuation system of the electron beam irradiation device is operated when reaching a set value of a second degree of vacuum lower than that of the first degree of vacuum. The electron beam irradiation is executed when the degree of vacuum is between the set value of the first degree of vacuum and the set value of the second degree of vacuum and when the evacuation system is stopped. COPYRIGHT: (C)2003,JPO
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