APPARATUS AND METHOD FOR BATCH PROCESSING SEMICONDUCTOR SUBSTRATES IN MAKING SEMICONDUCTOR LASERS

摘要

An apparatus and method for batch processing semiconductor lasers producing substantially contamination free laser bar end surfaces for optimal growth of end surface layers are provided. The method includes loading a laser cell comprising a plurality of laser bars and an empty cassette capable of holding a plurality of laser bars into a cleaving chamber and pumping the cleaving chamber down to a desired pressure. Next, a cleaving cycle is performed in which an end laser bar is cleaved off the laser cell. Laser bars are deposited in the cassette. The cassette is then moved into a deposition chamber where a layer of material is deposited on one end surface of all of the laser bars.