| 摘要 |
PROBLEM TO BE SOLVED: To improve an accuracy in the optical measurement of an aligner. SOLUTION: This measurement image pick-up device is used as an optical measuring device of an aligner and equipped with a plurality of image pick-up units, a measurement processing unit, and a power control unit. The image pick-up units are annexed to the optical unit of the aligner to image an object with their own timing. The measurement processing unit enables image signals picked up by the image pick-up units to undergo measurement signal processing to generate measurement data for the aligner. On the other hand, the power control unit carried out the power control of the image pick-up units in accordance with the operation timing of the image pick-up units. That is, the power control unit feeds an electrical power necessary for an image pick-up operation to the image pick-up units in operation. The power control unit stops feeding a power to the image pick-up unit not in operation or reduces a power supplied to the image pick-up unit not in operation. COPYRIGHT: (C)2003,JPO
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