发明名称 |
METHOD FOR REDUCING CONTACT RESISTANCE BETWEEN CARBON NANO TUBE AND METAL |
摘要 |
PURPOSE: A method for reducing contact resistance between a carbon nano tube and a metal is provided to reduce the contact resistance and improve the overall characteristic by irradiating laser to a contact point between the carbon nano tube and the metal. CONSTITUTION: A laser beam is irradiated to the contact point between the carbon nano tube(27) and the metal(25) during a predetermined interval of time to reduce the contact resistance between the carbon nano tube and the metal. The metal has a high work function, including Au or Pt.
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申请公布号 |
KR20030063528(A) |
申请公布日期 |
2003.07.31 |
申请号 |
KR20020003686 |
申请日期 |
2002.01.22 |
申请人 |
SAMSUNG SDI CO., LTD. |
发明人 |
HUH, JEONG NA;JUNG, TAE WON;LEE, CHANG SU;LEE, HWI GEON;LEE, JEONG HUI;YOO, JI BEOM;YOO, SE GI |
分类号 |
H01L21/428;(IPC1-7):H01L21/428 |
主分类号 |
H01L21/428 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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