发明名称 METHOD FOR REDUCING CONTACT RESISTANCE BETWEEN CARBON NANO TUBE AND METAL
摘要 PURPOSE: A method for reducing contact resistance between a carbon nano tube and a metal is provided to reduce the contact resistance and improve the overall characteristic by irradiating laser to a contact point between the carbon nano tube and the metal. CONSTITUTION: A laser beam is irradiated to the contact point between the carbon nano tube(27) and the metal(25) during a predetermined interval of time to reduce the contact resistance between the carbon nano tube and the metal. The metal has a high work function, including Au or Pt.
申请公布号 KR20030063528(A) 申请公布日期 2003.07.31
申请号 KR20020003686 申请日期 2002.01.22
申请人 SAMSUNG SDI CO., LTD. 发明人 HUH, JEONG NA;JUNG, TAE WON;LEE, CHANG SU;LEE, HWI GEON;LEE, JEONG HUI;YOO, JI BEOM;YOO, SE GI
分类号 H01L21/428;(IPC1-7):H01L21/428 主分类号 H01L21/428
代理机构 代理人
主权项
地址
您可能感兴趣的专利