| 摘要 |
PROBLEM TO BE SOLVED: To provide a disc for an ion injection device which prevents a silicon wafer from metal contamination by preventing Al alloy of the disc from sticking to the silicon wafer caused by the sputtering of ion beam, and prevents the performance of a semiconductor element from deterioration. SOLUTION: A ring-shaped guard 11 made of material not deteriorating the performance of the semiconductor element is fixed vertically to the disc 8 so as to surround a pad 9 holding the silicon wafer 7. COPYRIGHT: (C)2003,JPO
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