| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump capable of improving the discharging and compressing performance of the pump even when a rotor and a stator are kept under a high temperature, miniaturizing the pump, and minimizing the necessary power. SOLUTION: In this vacuum pump having a gas discharging part for discharging a gas by interaction of the rotating rotor 36 and the stator 38 mounted in adjacent to the rotor 36, a distance between the rotor 36 and the stator 38 composing the gas discharging part is adjusted by distance adjusting mechanisms 86, 88 during the rotation of the rotor. COPYRIGHT: (C)2003,JPO |
