| 摘要 |
PROBLEM TO BE SOLVED: To provide a holder of the optimum specification for requirement to be able to enhance durability and inspection precision. SOLUTION: A conductive moving body 3 abutting on a specimen 2 in inspection is stored allowing reciprocal motion in a support hole 8 provided in the holder 5 under the condition energized by a coil spring 4, a tip part 3a thereof is projected in one side face 5a of the holder 5 via the support hole 8 and connected electrically to a wiring plate 9 layered on the other side 5b of the holder 5 via at least the coil spring 4, and the holder 5 is constituted of a holder main body 12 formed to have the support hole 8, and a coating layer 13 formed on a surface of the holder main body 12 including the support hole 8. COPYRIGHT: (C)2003,JPO
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