| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent the characteristics of a vibrator from being affected by a surrounding magnetic field to facilitate machining, and to advantageously adjust electric characteristics. <P>SOLUTION: A vibrator 2 comprises an integrally sintered body of ceramics along with a support stand 4, and a first flat section 6 that is thinner than the support stand 4 and whose main surface is extended in the vibration direction of the vibrator 2. A detection section comprises the first flat section 6, and a piezoelectric/electrostrictive element 12 for detection that is formed in one piece on the first flat section 6 by a film formation method. A second thin flat section 8 for reducing stiffness in the vibration direction of the vibrator 2 for facilitating vibration is provided integrally to the vibrator 2 so that the main surface is extended vertically to the vibration direction. A drive means 122 comprises a third flat section 10 having a main surface that extends in a direction in parallel with the main surface of the first flat section 6, and being thinner than the support stand 4. <P>COPYRIGHT: (C)2003,JPO |
