| 摘要 |
A front opening interface mechanical standard, or "FIMS", system is disclosed for ensuring proper registration of a pod door against a port door on a load port assembly without the use of guide pins on the port door. In a preferred embodiment, the load port assembly includes kinematic pins provided to mate within slots on the bottom of a FOUP to provide a fixed and repeatable position of the FOUP on the load port assembly. The load port assembly further includes a pair of latch keys protruding outwardly from the outer surface of the port door for mating within slots of a door latch assembly within the pod door. The load port assembly may further include vacuum seals on the port door, or magnetic assemblies, to further facilitate support of the pod door on the port door. In one embodiment, with the above constraints, the load port assembly may initially include removable alignment pins. The alignment pins operate in conjunction with a calibration fixture to set the respective and collective heights of the kinematic pins on the load port assembly. Once the kinematic pins are adjusted so that the vertical plate is parallel to the port door and the openings in the vertical plate mate cleanly over the removable alignment pins, the calibration fixture may be removed and the alignment pins may be removed from or retracted back into the port door. Thereafter, a FOUP may be placed on the pod advance plate and advanced to the port door. |
