| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared detecting element and a method and a device for manufacturing the same capable of enhancing infrared absorptivity of an infrared absorbing film. SOLUTION: This infrared detecting element is provided with an infrared absorbing film 104 where incidence infrared energy is converted into thermal energy, and detects incidence infrared intensity. The infrared absorbing film 104 is provided with a plurality of film thickness local maximum points, and a difference in film thickness between the film thickness local maximum point and a film thickness local minimum point and a interval between the film thickness local maximum points on the same plane are set so that effective reflectivity is reduced by interfering or scattering effect. The difference in film thickness between the plurality of the film thickness local maximum points and the film thickness local minimum points is equal to or larger than a quarter of a infrared wavelength to be measured, and the interval between the plurality of the film thickness local maximum points on the same plain is shorter than the infrared wavelength to be measured. COPYRIGHT: (C)2003,JPO
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