摘要 |
<P>PROBLEM TO BE SOLVED: To form a polarized inverted area on the +C surface of an LiTaO<SB>3</SB>substrate. <P>SOLUTION: A metallic film or oxide film of the metal is formed on the +C surface of the LiTaO<SB>3</SB>substrate and afterwards, the LiTaO<SB>3</SB>substrate is heated while applying a voltage between the film and the -C surface of the LiTaO<SB>3</SB>substrate under a gas atmosphere containing air or oxygen such that the side of the metal film or oxide film can become a positive voltage. After the lapse of a desired heating time, the applied voltage is lowered and the LiTaO<SB>3</SB>substrate is cooled. <P>COPYRIGHT: (C)2003,JPO |