发明名称 SURFACE ACOUSTIC WAVE DEVICE AND PRODUCTION METHOD THEREFOR
摘要 <P>PROBLEM TO BE SOLVED: To form a polarized inverted area on the +C surface of an LiTaO<SB>3</SB>substrate. <P>SOLUTION: A metallic film or oxide film of the metal is formed on the +C surface of the LiTaO<SB>3</SB>substrate and afterwards, the LiTaO<SB>3</SB>substrate is heated while applying a voltage between the film and the -C surface of the LiTaO<SB>3</SB>substrate under a gas atmosphere containing air or oxygen such that the side of the metal film or oxide film can become a positive voltage. After the lapse of a desired heating time, the applied voltage is lowered and the LiTaO<SB>3</SB>substrate is cooled. <P>COPYRIGHT: (C)2003,JPO
申请公布号 JP2003209457(A) 申请公布日期 2003.07.25
申请号 JP20020006409 申请日期 2002.01.15
申请人 MITSUBISHI ELECTRIC CORP 发明人 ECCHU MASAO;FUJISHITA NAOMITSU;MURASE ISAO;MATSUMOTO MITSUTERU
分类号 H01L41/09;H01L41/18;H01L41/22;H01L41/29;H03H3/08;H03H9/25 主分类号 H01L41/09
代理机构 代理人
主权项
地址