| 摘要 |
PROBLEM TO BE SOLVED: To provide electrostatic microactuators with excellent dimension accuracy and stability that can be mass-produced in a state of a single crystal silicon wafer. SOLUTION: The microactuator comprises: a first (stationary) part (22) for attachment to a flexure of a head positioning system in a disk drive; and a second (movable) part (24) to which a slider is attachable, which is pivotally coupled (42, 44) to the first part. The first and second parts include elongate strips (30, 32) which are interdigitated to provide comb electrodes. COPYRIGHT: (C)2003,JPO
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