| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor sensor device with improved detection precision of temperature by further improving linearity in a temperature-voltage characteristics which represents relationship between temperature and output voltage. SOLUTION: A pressure guiding part 1a comprises a pressure guiding hole 1c to guide in a fluid. A base plate 3 is provided with; a hole 3c to transmit the pressure and temperature of the fluid to a semiconductor sensor 4; and a mounting part 3b on which the semiconductor sensor 4 is disposed. By bonding a flange part 3a extended from the mounting part 3b to the pressure guiding part 1a, one end of the pressure guiding hole 1c is closed. A circuit board 5 is disposed on the base plate 3, and comprises a housing hole 5a to house the semiconductor sensor 4 with which the board 5 is electrically connected. A constant current source circuit 20 supplies a prescribed constant current to a bridge circuit 21. A temperature characteristics adjusting means 20g adjusts temperature characteristics, and is so disposed on the circuit board 5 as to be close to the base plate 3. COPYRIGHT: (C)2003,JPO
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