Methods for forming features in polymer layers

摘要

Methods of forming features in polymeric materials by laser ablation techniques alone, or by the combined use of laser ablation techniques and photolithography, are disclosed. The methods can be used to pattern non-photosensitized materials, as well as photosensitized materials. The patterned features can have different shapes, dimensions and aspect ratios in the same polymer layer. Structures including the patterned features can include multiple layers formed of photosensitized and/or non-photosensitized polymer materials.