| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and device of repair with laser which is excellently maintained and has a stability, by which a material which is hardly removed with a conventional device is processable. <P>SOLUTION: A light source 100 is a CW-Q switch laser having a pulse width of 50 to 100 ns. Light emitted from the light source 100 is made incident on an optical fiber 202 after passing through an incident lens unit 200 and is guided to a microscope 300 by the optical fiber 202. Thereafter the light is made incident on the microscope 300 after being collimated with a collimate lens unit 204 provided at the top end of the microscope 300. The light passed through the optical path inside the microscope 300 is condensed on an object to be processed 500 with an object lens 312 in a form based on a beam forming slit 306, thus a machining is processed. <P>COPYRIGHT: (C)2003,JPO</p> |
