| 摘要 |
PROBLEM TO BE SOLVED: To provide an aberration correcting device of a charged particle beam device capable of stably and optimally correcting an aberration over a long time. SOLUTION: For correcting a chromatic aberration, this aberration correcting device has four-stage electrostatic quadrupoles 1, 2, 3, and 4, two-stage magnetic field type quadrupoles 5 and 6 for superimposing the magnetic potential distribution similar to the electric potential distribution of the central two-stage electrostatic quadrupoles 2 and 3, an objective lens 7, an operation display part 9 for changing accelerating voltage and an operating distance, a power source 10 for supplying voltage to the four-stage electrostatic quadrupoles 1 to 4, a power source 15 for exciting the two-stage magnetic field type quadrupoles 5 and 6, a power source 17 of the objective lens 7, and a control part 19 for controlling the power sources 10 and 15 on the basis of operation or the setting of the operation display part 9. When changing the accelerating voltage, excitation of the magnetic field type quadrupoles is maintained constant, and the chromatic aberration is corrected by adjusting combined magnification of the fourth electrostatic quadrupole 4 and the objective lens 7. COPYRIGHT: (C)2003,JPO
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