发明名称 Jig for adjusting curvature of substrate
摘要 Jig for adjusting curvature of a substrate permits to measure an amount of sag of the substrate coming from variation of a length of the slot or the support bar by varying the length of the slot or the support bar, thereby permitting easy fabrication of the cassette according to a trend of fabricating thinner substrate.
申请公布号 US2003132177(A1) 申请公布日期 2003.07.17
申请号 US20020328000 申请日期 2002.12.26
申请人 SA YOUNG HWAN 发明人 SA YOUNG HWAN
分类号 G02F1/13;H01L21/673;(IPC1-7):A47G19/08 主分类号 G02F1/13
代理机构 代理人
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