发明名称 |
Method for adjusting a micro-mechanical device |
摘要 |
A method for making a MEMS device comprises forming a plurality of micromechanical elements on a first substrate; forming circuitry and electrodes on a second substrate, the first and second substrates extending in a plane in X and Y directions; aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; singulating the assembly into assembly portions; and altering the gap for each assembly portion. Another embodiment involves aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; actuating and testing the micromechanical elements of the assembly; and altering the gap for each assembly. A further embodiment involves aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; wherein the micromechanical elements are actuated while bonding of the substrates.
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申请公布号 |
US2003134449(A1) |
申请公布日期 |
2003.07.17 |
申请号 |
US20030338561 |
申请日期 |
2003.01.07 |
申请人 |
REFLECTIVITY, INC., A CALIFORNIA CORPORATION |
发明人 |
HUIBERS ANDREW G. |
分类号 |
B81C3/00;(IPC1-7):H01L21/00 |
主分类号 |
B81C3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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