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发明名称
RESOLUTION-ENHANCEMENT DEVICE FOR AN OPTICALLY-COUPLED IMAGE SENSOR FOR AN ELECTRON MICROSCOPE
摘要
申请公布号
EP0853813(B1)
申请公布日期
2003.07.16
申请号
EP19960933893
申请日期
1996.09.24
申请人
GATAN, INC.
发明人
MOONEY, PAUL, E.;KRIVANEK, ONDREJ, L
分类号
H01J29/89;H01J37/22;(IPC1-7):H01J37/22
主分类号
H01J29/89
代理机构
代理人
主权项
地址
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