发明名称 Semiconductor memory and manufacturing method of the same
摘要 A semiconductor memory comprises a first cell (memory cell) including a charge storage layer, and a second cell including a charge storage layer and used with its set threshold value fixed. The threshold value of the second cell is generally apt to return to the initial state, i.e., initial threshold value, when damaged by baking. So, the initial threshold value is shifted to approach the threshold value to be set, as closely as possible. The data retention characteristic of the second cell (reference cell, redundancy memory cell, or OTP region cell) formed into the same construction in the same process as the first cell, can be considerably improved without unnecessarily increasing steps of manufacturing process.
申请公布号 US6593158(B1) 申请公布日期 2003.07.15
申请号 US20000537432 申请日期 2000.03.27
申请人 FUJITSU LIMITED 发明人 TAKAHASHI SATOSHI
分类号 H01L21/8247;H01L27/105;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/266;H01L21/824 主分类号 H01L21/8247
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