| 摘要 |
PROBLEM TO BE SOLVED: To provide a magneto-resistance effect head of a narrow reading gap wherein Barkhausen noise, intermittently generated random noise and instability of reproducing output waveform are suppressed, and sufficient electric reliability is secured. SOLUTION: In the manufacturing method of a magneto-resistance effect head, etching is carried out by using a mask pattern made of a resist having a resist side face inclined angle to manufacture a magneto-resistance effect head where a sensor end inclined angle which is a sharp angle of 60°or higher is provided, and digging in a lower insulating gap layer is in a range of 0 nanometer to 2 nanometer on the flat part of the lower insulating gap layer. By the sharp sensor end inclined angle of 60°or higher, electromagnetic conversion characteristics of the magneto-resistance effect sensor are improved and, by setting the digging on the flat part of the lower insulating magnetic gap layer in the range of 0 nanometer to 2 nanometer, insulation destruction is prevented to realize the magneto-resistance effect head of a narrow reading gap. COPYRIGHT: (C)2003,JPO
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