| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing device controlling method that avoids acquiring wrong recipe IDs (data related to manufacturing/processing conditions) for a manufacturing device or setting up wrong recipe IDs for a manufacturing device so as to improve the manufacturing device in manufacturing yield, which is suitable for controlling the manufacturing device (e.g., a semiconductor manufacturing apparatus used in a wafer process). <P>SOLUTION: The specification recipe ID of a lot type as an object of processing are automatically acquired from a device server by the use of a host personal computer, and the recipe ID is transmitted to a semiconductor manufacturing device (e.g., etching device) 1, to give a processing start instruction. <P>COPYRIGHT: (C)2003,JPO</p> |
