发明名称 MICRO-VARIATION DETERMINATION METHOD, RELIABILITY EVALUATION METHOD AND PROGRAM
摘要 PROBLEM TO BE SOLVED: To provide a micro-variation determination method capable of surely and easily determining a micro-variation and a program. SOLUTION: In this micro-variation deciding method, a micro-variation originating point in a data train composed of a plurality of data is determined. A plurality of data constituting a part of the data train is successively extracted with a fixed number of times of extraction while changing an extraction range, and respective standard deviations are calculated. By comparing these standard deviations with each other, it is determined that the micro-variation originating point is included, e.g. in the extraction range having the maximum standard deviation. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003197703(A) 申请公布日期 2003.07.11
申请号 JP20010393500 申请日期 2001.12.26
申请人 TOSHIBA CORP 发明人 SATAKE HIDEKI
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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