摘要 |
An acceleration sensor includes a bridge circuit including two capacitors and two piezoelectric vibrators on which reverse stresses are exerted by acceleration, and a voltage-dividing impedance circuit provided between a second junction point and a third junction point. The signal of a voltage-dividing point of the voltage-dividing impedance circuit is fed back to a first junction point, so that an oscillation circuit is provided. An oscillating-output phase difference between the second and third junction points is detected by a phase-difference-signal processing circuit and is output as an acceleration-detection signal.
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