发明名称 THIN LAYER OBLIQUE ILLUMINATION METHOD FOR OPTICAL SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a thin layer oblique illumination method capable of detecting substances and molecules with high sensitivity by use of light and observing these with a low background and high sensitivity with an optical microscope by using an optical system equivalent to that of a microscope. SOLUTION: When the thickness of illuminating light at a sample is defined as d, the incident angle of the illuminating light at the sample asθ, the distance from the central axis of the illuminating light at a post focal plane of an objective lens as X, the incident angle of the illuminating light on the objective lens as #, and the half of the opening angle of the incidence of the illuminating light on the objective lens asδϕ, the equation d=2 r.cosθto give the thickness d of the illuminating light at the sample indicates that the incident angleθof the illuminating light on the sample is determined by X andϕand that the irradiation radius r at the sample observation surface is the value determined byδϕ. Accordingly, the reduction of the thickness d of the illuminating light can be realized by making cosθand r smaller. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003185930(A) 申请公布日期 2003.07.03
申请号 JP20010380967 申请日期 2001.12.14
申请人 JAPAN SCIENCE & TECHNOLOGY CORP 发明人 TOKUNAGA MAKIHIRO
分类号 G01N21/64;G01Q10/02;G01Q30/02;G01Q30/04;G02B21/06;(IPC1-7):G02B21/06 主分类号 G01N21/64
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