发明名称 High performance controller for shifting resonance in micro-electro-mechanical systems (MEMS) devices
摘要 Devices being controlled electronically via physical manipulation often display a resonance. In many circumstances, the frequency range of operation is not close to the resonance frequency. In these cases, the resonance can be removed through the use of simple compensation techniques such as filters. However, when the resonance frequency is close to the frequency range of operation and when the resonance frequency can change depending on temperature, time, and physical position of the device, simple compensation techniques cannot be used. The present invention presents a non-mechanical technique for providing compensation for devices with a shifting resonance. The non-mechanical technique allows for the compensation to be performed via computation.
申请公布号 US2003123046(A1) 申请公布日期 2003.07.03
申请号 US20020314746 申请日期 2002.12.09
申请人 HEATON MARK W. 发明人 HEATON MARK W.
分类号 G01P3/36;G05B19/404;(IPC1-7):G01P3/36 主分类号 G01P3/36
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