| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of stably manufacturing synthetic quartz glass excellent in homogeneity in fluorine contents, and to provide the synthetic quartz glass excellent in homogeneity in a refractive index, in light resistance, and in light transmittance. <P>SOLUTION: The synthetic quartz glass is characterized in that a mean bulk density of porous quartz glass in an OH group reducing process is≤1.6 g/cm<SP>3</SP>, and in a sectional area perpendicular to a growing axis of the porous quartz glass, the difference between a maximum value and a minimum value in the bulk density is≤0.6 g/cm<SP>3</SP>in a range excluding by 20 mm toward inside from the outer periphery of the sectional area. <P>COPYRIGHT: (C)2003,JPO</p> |
