METHOD FOR MANUFACTURING PYROLYTIC CARBON OR GRAPHITE- COATED CARBON MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a method for inexpensively manufacturing a very pure pyrolytic carbon or graphite-coated carbon material with good gas sealing characteristics.

SOLUTION: The method for manufacturing the pyrolytic carbon or graphite- coated carbon material is characterized in that the carbon material is coated with the pyrolytic carbon or the graphite by feeding in a hydrocarbon gas as a source gas and a hydrogen gas as a carrier gas together with a hydrogen chloride gas to the carbon material in a reduced pressure in the atmosphere of 1,200°C or higher.

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