LOW THERMAL EXPANSION CERAMIC AND MEMBER FOR EXPOSURE SYSTEM

摘要

A low-thermal-expansion, rigid and wear-resistant ceramic is provided.

The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol% to 40 vol % of at least one selected from the group consisting of carbides, nitrides, borides and silicides of group 4a elements, group 5a elements and group 6a elements, and boron carbide. The ceramic has a porosity of 0.5 % or less and a thermal expansion coefficient, at 10°C to 40°C, of 1.5 × 10-6/°C or less.