NONCONTACT-TYPE TEMPERATURE MEASURING SENSOR

摘要

PROBLEM TO BE SOLVED: To design a temperature measuring sensor having a smaller area but the same sensitivity in comparison with a known sensor or higher sensitivity but the same area. SOLUTION: The noncontact-type temperature measuring sensor is a sensor for measuring temperatures by thermally sensitive regions arranged above and/or bellow a membrane arranged on a cavity part. The cavity part is etched by a reaction ion etching method and completely specified along side surfaces by side walls arranged at angles between 80°-100°with respect to the membrane, and the adjacent side walls are arranged at an angle of at least 40°with respect to each other. COPYRIGHT: (C)2003,JPO