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发明名称
VORRICHTUNG ZUR ERFASSUNG VON ANORMALER PLASMAENTLADUNG UND VERFAHREN DAZU.
摘要
申请公布号
DE1189491(T1)
申请公布日期
2003.06.26
申请号
DE20010917520T
申请日期
2001.03.28
申请人
JAPAN SCIENCE AND TECHNOLOGY CORP., KAWAGUCHI;KUMAMOTO TECHNOPOLICE FOUNDATION, KUMAMOTO
发明人
YASAKA, MITSUO;TAKESHITA, MASAYOSHI
分类号
B01J19/08;B01J19/10;G01H1/00;G01N29/06;G01N29/14;G01N29/22;G01N29/38;G01N29/44;H01J37/32;H05H1/00;(IPC1-7):H05H1/00;H01L21/205;H01L21/302;G01N29/04
主分类号
B01J19/08
代理机构
代理人
主权项
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