Method and device for measuring the flow of a fluid

摘要

To measure the flow in a liquid, the liquid (1) is led in a duct (2) along a flow sensor (3). The flow sensor (3) is integrated together with a processing and control circuit on a semiconductor substrate. It comprises a heating and, symmetrically thereto, two temperature sensors. The flow is determined from the temperature difference between the temperature sensors and/or from the power dissipation of the heating. For calibrating the sensor, a valve (4) is provided by means of which the duct (2) can be interrupted. This arrangement allows a flow measurement of high accuracy.