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发明名称
INTEGRATION OF SILICON ETCH AND CHAMBER CLEANING PROCESSES
摘要
申请公布号
EP1320876(A2)
申请公布日期
2003.06.25
申请号
EP20010971051
申请日期
2001.09.13
申请人
APPLIED MATERIALS, INC.
发明人
LIU, WEI;WILLIAMS, SCOTT;YUEN, STEPHEN;MUI, DAVID;SHEN, MEIHUA
分类号
H01L21/3065;H01L21/76;(IPC1-7):H01L21/306;C23C16/44
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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