发明名称 Semiconductor method of making electrical connection between an electrically conductive line and a node location, and integrated circuitry
摘要 A semiconductor processing method of making electrical connection between an electrically conductive line and a node location includes, a) forming an electrically conductive line over a substrate, the substrate having an outwardly exposed silicon containing node location to which electrical connection is to be made, the line having an outer portion and an inner portion, the inner portion laterally extending outward from the outer portion and having an outwardly exposed portion, the inner portion having a terminus adjacent the node location, and b) electrically connecting the extending inner portion with the node location. An integrated circuit is also described. The integrated circuit includes a semiconductor substrate, a node location on the substrate, and a conductive line over the substrate which is in electrical communication with the node location. The conductive line includes an outer portion and an inner portion. The outer portion has a terminus and the inner portion extends laterally away from the outer portion terminus and generally toward the node location. The inner portion is in electrical communication with the node location.
申请公布号 US6583042(B2) 申请公布日期 2003.06.24
申请号 US20010824897 申请日期 2001.04.02
申请人 MICRON TECHNOLOGY, INC. 发明人 MANNING MONTE
分类号 H01L21/768;(IPC1-7):H01L21/476 主分类号 H01L21/768
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