GASEOUS NITROGEN TRIFLUORIDE PURIFICATION METHOD

摘要

FIELD: chemical engineering. SUBSTANCE: gaseous nitrogen trifluoride is freed of carbon tetrachloride impurities via selective adsorption of the former by dehydrated erionite at temperature between -30 and 30 C followed by displacement of carbon tetrachloride with inert gas, desorption and condensation of thus purified nitrogen trifluoride. Purity of product is 99.99% and content of CF4 is no higher than 10 ppm. EFFECT: enhanced economical efficiency and achieved easy industrial realization. 2 cl, 1 tbl, 4 ex