| 摘要 |
PROBLEM TO BE SOLVED: To easily compare the color information of a surface of a measured matter acquired through a confocal optical system, with an actual measured matter. SOLUTION: The color light of two or more wavelengths from the measured matter picked up through the confocal optical system is stored in a slice image storing means 1 as the color information. The displacement of a focal face of the confocal optical system and the measured matter in picking up the color image on the color information is acquired from a displacement information acquiring means 2. A surface data updating means 3 updates the surface data stored in the surface data storing means 5 on the basis of the color information and the displacement information at an updating timing by an update requirement informing means 4. The surface data is composed of the surface shape composed of the height information of each position of the surface of the measured matter and the surface color information composed of the color information of each position of the surface of the measured matter, and the surface color information is updated on the basis of the color information near the surface of the measured matter. COPYRIGHT: (C)2003,JPO
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