发明名称 |
Resilient and rugged probe |
摘要 |
A resilient and rugged probe, used to measure an on-wafer signal. The probe has a metal probe tip, a resilient soft multi-layered dielectric substrate, a planar transmission structure and a fixed end. The probe tip is connected to the planar transmission structure. The planar transmission structure is attached to and supported by the resilient soft multi-layered dielectric substrate and then connected to the fixed end.
|
申请公布号 |
US2003112024(A1) |
申请公布日期 |
2003.06.19 |
申请号 |
US20010033749 |
申请日期 |
2001.12.19 |
申请人 |
DENG JOSEPH D. S.;LEE HONG-CHYI |
发明人 |
DENG JOSEPH D. S.;LEE HONG-CHYI |
分类号 |
G01R1/067;G01R1/073;(IPC1-7):G01R31/02 |
主分类号 |
G01R1/067 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|