发明名称 Implanted asymmetric doped polysilicon gate FinFET
摘要 An asymmetric field effect transistor (FET) that has a threshold voltage that is compatible with current CMOS circuit designs and a low-resistance gate electrode is provided. Specifically, the asymmetric FET includes a p-type gate portion and an n-type gate portion on a vertical semiconductor body; an interconnect between the p-type gate portion and the n-type gate portion; and a planarizing structure above the interconnect.
申请公布号 US2003113970(A1) 申请公布日期 2003.06.19
申请号 US20010683328 申请日期 2001.12.14
申请人 FRIED DAVID M.;NOWAK EDWARD J.;RANKIN JED H. 发明人 FRIED DAVID M.;NOWAK EDWARD J.;RANKIN JED H.
分类号 H01L21/28;H01L21/265;H01L21/336;H01L29/423;H01L29/49;H01L29/786;(IPC1-7):H01L21/336 主分类号 H01L21/28
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