Method for structure investigation in a semiconductor substrate,申请号EP20010103184-传众专利搜索

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发明名称	Method for structure investigation in a semiconductor substrate
摘要
申请公布号	EP1126477(A3)	申请公布日期	2003.06.18
申请号	EP20010103184	申请日期	2001.02.10
申请人	LEICA MICROSYSTEMS LITHOGRAPHY GMBH	发明人	SCHNEIDER, GERD,DR.;NIEMANN, BASTIAN,DR.;HAMBACH, DIRK
分类号	G01N23/04;G21K7/00;H01L21/027;H01L21/66;(IPC1-7):G21K7/00;G01N23/08	主分类号	G01N23/04
代理机构		代理人
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