| 摘要 |
Disclosed is a method of controlling a manufacturing process of a photoelectric conversion apparatus, comprising putting a mark for controlling the manufacturing process in a peripheral region on a surface of a transparent substrate or in that region of a side surface of the transparent substrate, which is not irradiated with the laser beam used for the laser-scribing of each of a transparent electrode layer, a semiconductor layer and a reverse electrode layer, the mark being read in the subsequent process and the subsequent process being controlled by utilizing the mark thus read.
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