| 摘要 |
<P>PROBLEM TO BE SOLVED: To minimize the deformation and the like of a pellicle frame when an inert gas supply part is put close to the pellicle frame to supply an inert gas into a pellicle space. <P>SOLUTION: On a reticle support base 28, a reticle 23 with a pellicle is movably mounted and then the inert gas supply part 29 and an inert gas discharge part 37 are driven so as to sandwich the pellicle frame 25 to position the pellicle frame 25 and also bring the inert gas supply part 29 and inert gas discharge part 37 into contact with the pellicle frame 25. In this state, the inert gas is supplied from the inert gas supply part 29 into the pellicle space through an air vent 27 of the pellicle frame 25 and discharged to the inert gas discharge part 37 through an air vent 27 provided on the opposite side. <P>COPYRIGHT: (C)2003,JPO |
