| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-frequency heat plasma apparatus which provides a low-temperature plasma flame having a wide uniform temperature range without fear of an accidental fire of a plasma torch. <P>SOLUTION: A two-stage torch (quartz tube) 10, to which electric power is applied by a power source by connecting respective induction heating coils 17, 18 of a first torch 11 generating first plasma 1 and a second torch 21 generating second plasma 2 in series or in parallel, is provided. A diffuse gas discharge part 33 and a buffer block 34 are provided in a plasma flame to diffuse the plasma flame, thereby lowering the temperature of the plasma flame to widen the range of uniform temperature. <P>COPYRIGHT: (C)2003,JPO |
