STANDOFFS FOR PASSIVE ALIGNMENT OF SEMICONDUCTOR CHIP AND COUPLING BENCH

摘要

Disclosed is a method for forming a first optical device and a vertical stand-off on adjacent regions of a substrate. The method comprises the steps of: depositing subsequent layers of optical materials on the substrate and defining features of the optical device by masking and etching regions of at least one layer; defining the transverse extent of the stand-off by protectively masking a separate region of the or each layer that is etched; modifying the relative thickness of an upper section of the stand-off and the first optical device so that a second optical device subsequently supported by the stand-off is in close optical alignment with the first optical device; and etching a trench through one or more layers of material between the vertical stand-off and the first optical device. Also disclosed is an optical assembly comprising a first optical device and at least one vertical stand-off formed on adjacent regions of a substrate.