| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a ceramic substrate enhanced in elevating temperature characteristics and adsorption capability, and enhanced in connection reliability between electric conductors embedded in the substrate and external terminals. <P>SOLUTION: The ceramic substrate for semiconductor manufacturing and inspection unit, where the electric conductors are embedded inside an insulative ceramic substrate, bag holes are provided from a substrate surface toward the embedded electric conductors, and the external terminals are attached via the bag holes, an electric conductive layer is provided at least on a part of the inner walls of the bag holes, and the electric conductors and the external terminals are electrically connected via the part of the conductive layer. <P>COPYRIGHT: (C)2003,JPO</p> |
