MANUFACTURING METHOD OF SEMICONDCUTOR DEVICE,申请号KR19900009893-传众专利搜索

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发明名称	MANUFACTURING METHOD OF SEMICONDCUTOR DEVICE
摘要
申请公布号	KR930010976(B1)	申请公布日期	1993.11.18
申请号	KR19900009893	申请日期	1990.06.30
申请人	TOSHIBA CO., LTD.	发明人	TSUJI, HITOSHI;HIRATA, OSAMU;HASHIMOTO, HIDETSUNA;HARAGUCHI, HIROSHI
分类号	G03F7/20;G03F7/38;H01L21/3105;H01L21/311;H01L21/768;(IPC1-7):H01L21/302	主分类号	G03F7/20
代理机构		代理人
主权项
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