| 摘要 |
PROBLEM TO BE SOLVED: To provide a centering device where the centering device itself has a simple and inexpensive structure, and centering operation is performed fast and accurately, in addition, a space in which a hand of a conveyer can be inserted is provided around a turn table, and to provide a method of the centering and an exposure apparatus having the centering device and a method of the exposure. SOLUTION: It is configured that respective cam followers 7 disposed around a substrate for exposure placed on a turntable 1 are moved a common distance to the center of the turntable in synchronization with each other and the four cam followers are contacted to the substrate at the same time, and, in order to perform the centering, rotation of a rotary table 8 that is a driving source of the apparatus is transmitted to base members 10, 15 through ring arms 4, 14, and thus the substrate for exposure 12 is pressed from both sides, thereby achieving the centering. COPYRIGHT: (C)2003,JPO
|
